The A3P series is specially designed to reduce operational costs.

A wide range of pumping speeds, from 100 m3/h to 1000 m3/h, with the A3P series responding every 300mm for moderate vacuum requirements at a lower operating cost.

Compared to traditional vacuum extraction solutions, it saves up to 50% of electricity consumption, primarily due to lower cooling water flow and reduced nitrogen blow-off. All of this is why it reduces consumption by up to 50%!

Features:

·Low utility costs: A pump with a flow rate of 1000 m3/h only requires 1.5 kW

· Compact design: Only 310mm wide

Compound Rotor Technology

Corrosion-resistant

Low noise

Low vibration

· Compatible with Semi S2-0706

Primary Advantages:

·Reduced total costs

· Compact land area, space-saving

· High reliability

· Compliant with semiconductor processing regulations

Application:

· Etching (oxidation, polymerization)

RTP Protocol

· Decompose/Grayscale

· Implant Source