详情描述

Rike Micro FT-3110 Series Fully Automatic Four-Probe Tester

One.Function Description：

Four-point probe method, fully automated running measurement system.PC SoftwareData collection and processing; ReferenceA.S.T.M. StandardTest semiconductor materials for resistivity and sheet resistance; set probe force values, test point numbers, and various measurementsMode Selection; Displayable: Resistance, Resistivity,Display2D,3DScan/Numeric ChartHumidity and temperature readingsOffer standard calibration resistor components.  Report OutputData Analytics.

Two.Application Scope

Rico Micro FT-3110 Series Fully Automatic Four-Probe Tester

WafersAmorphous SiliconMicron silicon and conductive film resistivity measurement; selective emitter diffusion wafers; surface passivation wafers; cross finger PN junction diffusion wafers; new electrode design, such as electroplated copper resistance measurement, etc.；Semiconductor materials analysis, piezoelectric materials, nanomaterials, solar cellsLCD, OLED, touch screenPending.

Specification Model

FT-3110A

FT-3110B(Expandable)

Resistor

10^-5～2×10^5Ω

10^-6～2×10^5Ω

2. Square Resistors

10^-5～2×10^5Ω/□

10^-6～2×10^5Ω/□

3. Resistivity

10^-6～2×10^6Ω-cm

10-7～2×106Ω-cm

4. Test Current

0.1μA.1μA.10μA，100µA，1mA，

10mA，100mA

1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA

5. Current Accuracy

±0.1%

6. Resistance Accuracy

≤0.3%

7. PC Software Operation

PC Software Interface: Resistance, Resistivity, Conductivity, Sheet Resistance, Temperature, Unit Conversion, Current, Voltage, Probe Shape, Probe Spacing, Thickness2D、3DGraphs and Reports GenerationWait

8. Pressure RangeSelect）

Probe pressure adjustable range: Software controlled,100-500gAdjustable

9. InquiryNeedle

Insulation Resistance Between Pins:≥1000MΩ; Mechanical shift: ≤0.3%

CopperGold plated or tungsten steelMaterialProbe Spacing1mm; 2mm; 3mm optional.Other specifications are customizable.

10.Measurable ChipSize Load PlatformSelect

Select:PedestalWafer Size:2-12 inches（6-inch150mm，12-inch300mm）Other specifications available for customization.

11. Analysis Mode

Single-point, five-point, nine-point, multi-point, diameter scan, surface scan, etc., automatic testing modes

12.Repetitive

Single PointRepetitive≤0.5% 

13ProtectionFeature

Limited range with pressure protection;误操作 and emergency stop protection; abnormal alarm

14Power Supply

InputAC 220V±10%, 50Hz, Power Consumption: <600W

III.ParametersMaterials：

 

   Rike Micro FT-3110 Series Fully Automatic Four-Probe Tester

 

Standard Configuration Additional Order Details:

Serial Number

Model

Product Name

Unit

Quantity

Note

1

3310-CSX

Test line

Set

1


2

09A

Standard Resistor

Piece

1-5

Select Specifications and Quantities

3

3310-YPT-2

WaferSample Platform

Set

1

2-inch; 4-inch; 6-inch; 12-inch options

4

3310-06B

Four-probe probe

Individual

1

Linear

5

340-TTZ

Gold-plated Spring Copper Needle4 units

Group

1

A set of 4

6

340-WTZ

Spring tungsten needle4 pieces

Group

1

A set of 4

7

3310-RJ

AnalysisSoftware

Set

1


8

PC

Computer+Printer

Set

1

Configure according to customer requirements

9

3310-JL

Testing and Technical Services

Copy

1

Measurement Certificate1 piece



Extended Warranty Service  

Year

1-3