详情描述

FT-3110 Series Fully Automatic Four-Terminal Probing Tester / Ohmmeter


I. Product Description:

Four-point probe method, fully automated measurement system, PC software for data collection and processing; tests semiconductor material resistivity and sheet resistance according to A.S.T.M. standard methods; adjustable probe pressure, number of test points, and multiple measurement modes available; displays: sheet resistance, resistivity, 2D/3D scanning/numerical graphs, temperature and humidity values, and provides standard calibration resistors. Data statistical analysis for report output.

Section II: Application Scope

FT-3110 Series Fully Automatic Four-Terminal Probing Tester / Ohmmeter

Wafer, amorphous/silicon carbide and conductive film resistivity measurement; selective emitter diffusion wafers; surface passivation wafers; cross finger PN junction diffusion wafers; new electrode designs, such as electroplated copper resistivity measurement, etc.; semiconductor material analysis, piezoelectric materials, nanomaterials, solar cells, LCDs, OLEDs, touchscreens, etc.

Specification ModelFT-3110AFT-3110B (Expandable)

Resistor10^-5～2×10^5Ω10^-6～2×10^5Ω

2. Square Resistance10^-5～2×10^5Ω/□10^-6～2×10^5Ω/□

3. Resistivity10^-6～2×10^6Ω-cm10-7～2×106Ω-cm

4. Test Current0.1μA.1μA.10μA，100µA，1mA，

10mA，100mA1A、100mA、10mA、1mA、100uA、10uA、1uA、0.1uA

5. Current Accuracy±0.1% 

6. Resistance Accuracy≤0.3%

7. PC Software OperationPC Software Interface: Resistance, Resistivity, Conductivity, Sheet Resistance, Temperature, Unit Conversion, Current, Voltage, Probe Shape, Probe Spacing, Thickness, 2D, 3D Maps, Report Generation, etc.

8. Pressure Range (Select)Probe pressure adjustable range: Software controlled, 100-500g adjustable

9. ProbeInsulation Resistance Between Needles: ≥1000MΩ; Mechanical Hysteresis: ≤0.3%

Gold-plated copper or tungsten steel, probe spacing available in 1mm; 2mm; 3mm, other specifications available upon request.

10. Selectable Chip Size CarrierSelection: Wafer Size on Carrier: 2-12 inches (6 inches = 150mm, 12 inches = 300mm); other specifications available for customization

11. Analytical ModeSingle-point, five-point, nine-point, multi-point, diameter scanning, surface scanning, etc., automatic testing modes

12. RepetitiveSingle Point Repetition: Repetition ≤ 0.5%

13. Protective FunctionsLimited range and pressure protection;误operation and emergency stop protection;abnormal alarm

14. Power SupplyAC 220V±10%, 50Hz, Power Consumption: <600W

FT-3110 Series Fully Automatic Four-Terminal Prober Resistance Meter