A precision aerostatic motion platform is a super-precision motion device based on aerostatic bearing technology, achieving frictionless movement through air film levitation. It is widely used in semiconductor, optics, aerospace, and other fields, featuring frictionless movement, high accuracy, high dynamic performance without maintenance, and support for non-standard customization. The aerostatic main shaft and turntable are high-precision rotating devices based on aerostatic bearing technology. The precision aerostatic turntable is a high-precision rotating equipment based on aerostatic bearing technology, with positioning accuracy up to 1.14 arc seconds and repeated positioning accuracy ≤ 0.61 arc seconds. It features frictionless, high-precision motion components with radial跳动 ≤ 100nm, high rotational speed, long service life, and high precision.




























