√ Integrated Testing
√ Super-fast
√ Modular architecture
√ User-friendly
√ Distinctive 1/f noise testing capability
Product Features
√ Integrated Testing
FS-Pro™ integrates DC testing, pulse testing, transient testing, capacitance testing, and low-frequency noise (1/f noise) testing into a single instrument, enabling complete low-frequency parameter characterization without the need to change cables or reprobe.
√ Ultra-fast
FS-Pro™ incorporates AI-driven testing technology, offering a testing speed up to 10 times faster than traditional semiconductor parameter testing systems, while maintaining test accuracy with enhanced speed.
√ Modular architecture
FS-Pro™ features a modular design, allowing for compactness while scalable to meet requirements, and supports multi-channel parallel testing up to 20 channels, effortlessly handling high-density production testing.
✓ User-friendly
The built-in LabExpress™ measurement control software features an intuitive user graphical interface, enabling powerful test analysis capabilities with just a few clicks. It also supports various probe stations and matrix switches, simplifying the automatic testing of wafer-level data. Moreover, it offers comprehensive solutions for semiconductor manufacturing.
√ Unique 1/f Noise Testing Capability
For advanced process devices, two-dimensional material devices, and photodetector testing applications, 1/f noise serves as one of the intrinsic important parameters of the devices. The 1/f noise performance limits the practical application capabilities of the devices. 1/f noise is widely present in various components and structures of semiconductor devices, and also sensitively reflects many potential defects in the materials and devices. Therefore, the measurement and analysis of 1/f noise have become a new approach to evaluate the quality characteristics and reliability of semiconductor devices.
Key Component Performance Specifications
FS380 High-Precision Source Measurement Unit (SMU)
Direct Current Test
±200V/1A range, high 200W output power, low 30fA current measurement accuracy, 30uV voltage measurement accuracy, quadrants operation
Pulse Test
±200V/3A range, high 480W output power, low 5pA current measurement accuracy, 30uV voltage measurement accuracy, narrow pulse width of 50us
● Transient Test
An arbitrary waveform output with a high sampling rate of 1.8 MS/s and a time step of 10 us.
Capacitance Testing (CV)
±200V/1A Range, 10Hz-10kHz Bandwidth, 20fF to 1mF Measurement Range
1/f Noise Test
Bandwidth 0.1Hz-100KHz, 1e-28A²/Hz baseline noise, 200V bias, 8s/bias test speed
FS336 External LCR Module
Capacitance Testing (CV, CF)
±40V range, 40Hz to 8MHz bandwidth
● 100fF to 10mF measurement range
Labexpress Graphical Test Software
LabExpress™ measurement software offers comprehensive DC, pulse, transient, capacitance, and noise testing capabilities, featuring an in-built library of common MOSFET, BJT, diode, resistor, and capacitor component types. With a rich variety of test types, even newcomers without component knowledge can easily get started. It also provides a complete solution set for daily applications in semiconductor wafer fabs. LabExpress™ also excels in data analysis, with advanced curve transformation and plotting features, along with common algebraic operations, simplifying real-time result analysis.
Industry Usage
In the industrial sector, FS-Pro™ has been adopted by numerous global design firms, semiconductor foundries, IDM, and design companies. Its precision, speed, and reliability have passed stringent industrial certifications. In the research field, FS-Pro™ has been utilized by dozens of universities and research institutions, supporting the publication of dozens of high-level academic papers to date. As a low-frequency noise, an effective non-destructive experimental method, it is increasingly recognized by scholars. FS-Pro™, with its integrated noise testing function as a semiconductor parameter analyzer, is increasingly indispensable in the research and development of new materials and devices.
