Masking fixture includes: a masking version body in a planar form, comprising two opposing holding groups, each group containing at least two holding sections, with two of the holding sections extending in different directions. The masking plate is designed such that at least two holding sections extend in different directions on opposite side edges, guiding the direction of the holding force applied. When tension is applied along the extension direction of each holding section using the fixture, the tension on the masking version body can be directed in various ways, allowing the force to be decomposed into two perpendicular directions. This not only improves the extensibility of the masking version body but also prevents the formation of wrinkles.

Requirement: A mask blank, characterized by including: a planar mask blank body, comprising two relatively set holding groups, each group including at least two holding sections, with two of the holding sections extending in different directions.

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