Product Features

LS Series:

High-speed exhaust and low-power consumption dry pumps. We offer 4 models to choose from, allowing you to select the appropriate exhaust volume dry pump based on the size of the equipment and operating conditions.

CR Series:

The CR series VerB is an air-cooled tool-type dry pump meeting international standards. Without oil used in the exhaust chamber, the rotor and cylinder operate in a non-contact manner, ensuring long-term stable operation.

The GR series is a simple dry pump designed for general industry, based on the LR/HR series, which boasts a wealth of experience and reliability.

LR/HR/UR Series

The LR/HR/UR series utilizes our independently developed high-temperature homogenization technology, effectively utilizing compressed heat, achieving high durability in hardware processes such as CVD and etching. When used in conjunction with ECO-SHOCK, it can achieve a 80% reduction in power consumption in the production line process. Additionally, with high maintenance performance and low noise, it can correspond to the full range of CE (optional). For more information on ECO-SHOCK, please inquire further.

Dry Pump Energy-Saving Adaptor ECO-SHOCK ES10

The ECO-SHOCK adapter, when paired with the selected dry pump, enables significant energy savings.

Dry Pump Energy-Saving Adapter ECO-SHOCK ES4A

ECO-SHOCK is an adapter that, when used with dry pumps, significantly reduces the electrical power consumption.

It's more suitable to reduce the electrical energy consumption of the preliminary dry pump, which needs to be frequently taken out and placed in the loading room, or like a turbo molecular pump, requires long-term operation to reach the desired pressure.