The iGX dry vacuum pump series sets a new standard for modern dry pumps with zero maintenance between major overhauls; it has become one of the most popular dry pumps, with over 20,000 units installed in most 300mm factories. The iGX series includes MicroTIM tool interface and Ethernet connectivity, enabling access to key data via web pages, and also features a set of network options to ensure continuous pump operation.

The iGX pump offers a wide range of peak flow rates, which can be adjusted to accommodate various application conditions, from clean to medium load processes. The modular design allows users to configure the iGX dry pump to meet the specific requirements of each factory. The compact footprint allows for multiple installation options, including on-tool, near-range, and remote operation.

By utilizing iGX dry pump technology, the entire factory can typically achieve a 40%* cost savings on facility expenses (compared to iL/iH dry pumps).

Based on a U.S. factory with 200 tools, 537 pumps/70% iGX pumps, and 30% iH pumps/iGX equipped with constant flow valves, 300mm in size.

Target applications include:

PVD, dielectric etching, conductor etching, metal etching, implantation sources; customers also use iGX for a range of cleaning and light-load applications.

Key Features and Advantages

Low power consumption and zero preventive maintenance reduce ownership costs.

Compact and lightweight, with flexible installation options available.

High-performance motors and variable frequency drive units.

Operate in standby mode with the eco-mode for lower power consumption.

High thermal conductivity materials and excellent design achieve low water flow and cooling.

Precision ceramic bearings ensure high load capacity, thus offering greater reliability.

Low vibration and noise level below 55dB(A), can be installed near the operation.