Reflective film thickness gauge/thickness gauge/F50 series
Automatic multi-point measurement imaging
The Filmetrics F50 series products can quickly measure film thickness at a speed of two points per second. An electric R-Theta platform can accept standard and customized clamping discs, with sample diameters ranging from 200mm to 450mm. (A stable sample stage can perform millions of measurements in our production system!)
The surveying pattern can be polar, rectangular, or linear, and you can also create your own surveying method without being limited by the number of measurement points. Built in dozens of predefined surveying patterns.
Different F50 models of instruments are distinguished based on their wavelength range. The standard F50 is a more popular product. Generally, shorter wavelengths (such as F50-UV) can be used to measure thinner films, while longer wavelengths can be used to measure thicker, more uneven, and opaque films.
Measurable sample film layer:
Basically, all smooth, non-metallic thin films can be measured.
Measurable samples include:
Silicon oxide, silicon nitride, diamond-like carbon (DLC)
Photoresist polymer polyimide
Polycrystalline silicon, amorphous silicon, and silicon
Additional benefits:
·Each system has a built-in library of over 130 types of materials, with hundreds more available for different applications
·Application engineers can provide immediate assistance (Monday Friday)
·Online "handlebar" support (requires Internet connection)

·Hardware Upgrade Plan