Small PECVD System
Model: PE1260S
Application: PECVD for small samples, graphene deposition, semiconductor coating, etc.
Dimensions: 1500*600*1000MM
Features: Touchscreen centralized one-button control; proven to have fast deposition speed, high film quality, fewer pinholes, and less prone to cracking.
The PECVD model is a streamlined version, integrating the advantages of most domestic manufacturers' tubular PECVD systems. It features a touch screen for centralized one-button control. Experiments have proven that this structure offers fast deposition rates, high film quality, fewer pinholes, and is less prone to cracking. Moreover, the control section employs a self-developed AIO fully automatic intelligent control system for the experimental electric furnace, making the operation more straightforward and the functionality more robust.
Key Features:
1. Automatic vacuum balance inside the tube—Real-time monitoring and automatic balancing of the vacuum inside the tube. The PECVD process requires the vacuum inside the quartz tube to typically be between 0.1～100Pa. The AIO control system of this model PECVD maintains the user-set vacuum inside the tube by automatically starting and stopping the vacuum pump, ensuring optimal uniformity of the film formation.
2. AIO Control System - Heating Control, Plasma RF Control, Gas Flow Control, Vacuum System Control all integrated into a single 7-inch touch screen for unified and centralized adjustment and operation, coordinated control - Chengyi AIO Control System
3. Scheduled Radio Frequency Power Control – Pre-set power levels and on/off times, operates automatically.
4. Hearth movement speed adjustable—According to experimental requirements, users can set the left and right movement speed and distance of the hearth. After deposition, the hearth can automatically move away from the deposition area for quick sample cooling.
5. Integrated whole machine structure - Only 1.5 meters in length, easy to move, and avoids the hassle of disassembled assembly.
Product Specifications:
| Heating Furnace Section: | |
| Furnace Mode: | Openable and movable furnace chamber |
| Display Mode: | 7-inch touchscreen |
| Ultimate Temperature: | 1200℃ |
| Operating Temperature: | ≤1150℃ |
| Rise Rate: | Recommended cooling rate: 10℃/min, max: 30℃/min |
| Movable Furnace Body | Yes, adjustable speed. |
| Single temperature zone length: | Main heating zone length: 200mm (optional with gas preheating section) |
| Boiler Tube Specifications: | 60*1150 mm |
| Temperature Control Accuracy: | ±1℃ |
| Sealing Method: | Rapid Flange Sealing |
| Temperature Curve: | 30 customizable "time-temperature curves" |
| Pre-storage Curve: | Pre-store up to 15 temperature curves |
| Over-temperature Alarm: | Please provide the Chinese content that needs to be translated into American English. |
| Overcurrent protection: | Available |
| Breakage Alert: | Available |
| Thermometric element: | Type K Thermocouple |
| Furnace Chamber Material: | Alumina fiber |
| Dimensions: | 1500*600*1000MM |
| Signal Frequency: | 13.56 MHz±0.005% |
| Power Output Range: | 5W-300W |
| Power Stability: | ±0.1% |
| Overall Efficiency: | >=70% |
| Power Factor: | >=90% |
| Cooling Method: | Forced air cooling |
| Vacuum section: | |
| Power: | 500W |
| Vacuum Rate: | 2Ls |
| Ultimate vacuum: | 4X10-2Pa |
| Airline System: | |
| 1 to 3-way quality flowmeters available (Qingxiu HuaChuang): | |
| Accuracy: ±1.5% | |
| Repeatability Precision: ±0.2% | |
| Operating Pressure Difference Range: 0.1 to 0.5 MPa | |
| Whole Machine System Features: | |
| Positive Pressure Measurement: | -100Kpa---100Kpa |
| Vacuum Measurement: | 10-2 Pa to 100 kPa (supports Ar measurement) |
| Positive Pressure Protection: | Support |
| Constant Pressure: | Supported |
| Intelligent Air Path | Support |
| Airline Timing: | Support |
| RF Operating Time Setting: | Support |
| Adjustable speed of movement: | Support |
