1. Core working principle
Air Film FormationBy injecting high-pressure gas (0.3-0.8 MPa) through the precise orifice array at the bottom of the turntable (throttle holes), a pressure differential is formed between the turntable and the base.3-20 μm thick gas filmAchieve contactless suspension.
Self-balancing designAutomatic adjustment of air film pressure distribution ensures static balance of the turntable (tilt < 0.1 arc seconds).
Drive Methodusually paired withCoreless Direct Drive Motor(No notch effect) orFriction wheel driveAvoid introducing mechanical vibrations.
2. Core Performance Indicators
| Parameters | Standard Grade | High precision grade (such as for lithography machines) |
|---|---|---|
| Radial跳动 | ≤0.5μm | ≤0.05μm |
| Axial跳动 | ≤1μm | ≤0.1μm |
| Angular resolution | 0.1 centisecond | 0.001 arcsecond |
| RPM Range | 0.1-300 RPM | 0.001-100 RPM |
| Carrying Capacity | 50-500kg | 10-100 kg (High Precision) |
3. Typical Application Scenarios
Photolithography machineWafer alignment rotation (rotational error on the ASML turntable < 0.01μm).
Optical ProcessingAspheric lens polishing (surface accuracy λ/20).
Inertial NavigationLaser Gyroscope Calibration (Angular Velocity Error < 0.001°/h).
Measurement and TestingRoundness Gauge Reference Turntable (Radial Error < 0.02μm).
4. Selection Comparison: Floating Platform vs. Other Platforms
| Type | Accuracy | RPM | Maintenance Requirements | Cost (Same specification) |
|---|---|---|---|---|
| Aeration Turntable | 0.001 arcsecond | Low to medium speed | Required gas source | ¥500k-5M |
| Mechanical Bearings | 1 centisecond | High-speed | Regular lubrication | ¥50k-200k |
| Magnetic levitation turntable | 0.0001 arcseconds | Ultra-high-speed | Electromagnetic Control | ¥2M-10M |
