Conveniently controlled direct-drive linear voice coil motor lithography machine applications

Voice Coil Linear Motor, also known as Lorentz motor or vibration mirror motor, is named for its structure resembling a loudspeaker's voice coil. It is a fast-response direct-drive motor with zero hysteresis and zero cogging effects, offering high frequency response, high acceleration, high speed, good force characteristics, easy control, small size, and low resolution. Abroad, the voice coil motor is considered an excellent servo drive unit. Depending on the configuration of the drive, feedback, controller, and control algorithm, voice coil motors generally achieve a motion frequency of 500-1000Hz, even higher.

The oscillating voice coil motor utilizes the technology of rectangular series products, bending them to form a certain angle for positioning, meeting the requirements of angular oscillation. The RS series can provide an oscillating angle of 90 degrees and a torque of up to 50 N-m. The oscillating voice coil motor products are applied in laser technology for mirror positioners, oscillating valve brakes, oscillating positioning, and flight controllers. They are involved in the semiconductor industry, automation, and aerospace industries. Oscillating voice coil motors are also known as--galvanometer motors.

Voice coil motors are primarily used in short stroke, high-speed, and high-acceleration movements, ideal for confined spaces; a common application is the auto-focus feature in smartphone cameras, which is entirely handled by the entire drive unit. The cylindrical voice coil motor series is widely applied in the market. These motors offer high acceleration rates, generating powerful forces ranging from 0.7N to 1000N, with stroke lengths under 50mm. This model is mainly used in medical, semiconductor, aviation, and automotive fields, including valve brakes, small replacement meters, vibration platforms, and active damping systems, among others.

Yunxi Electrical Equipment Technology Co., Ltd., located in Langfang, is a technology research and development enterprise in partnership with universities. Our main products include: brushless DC frameless torque motors, voice coil motors, stepper motors, servo motors, and screw displacement tables; special products: vacuum high-temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high-temperature screw platform, vacuum radiation screw platform, vacuum electrodes, and ion gauge. We can also develop and customize according to customer-specific requirements.

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