High-speed vacuum rectangular coil motor photolithography machine applications

Voice coil linear motors, also known as Lorentz motors or scanner motors, are named for their structure resembling a loudspeaker's voice coil. They are a fast-response direct-drive motor with zero hysteresis and zero cogging effects, featuring high frequency response, acceleration, speed, excellent force characteristics, easy control, small size, and high resolution. Abroad, voice coil motors are considered excellent servo drive units. Depending on the configuration of the drive, feedback, controller, and control algorithms, voice coil motors typically achieve motion frequencies of 500-1000Hz, even higher.

Compared to cylindrical solenoid motors, rectangular solenoid motors generate less thrust but have a longer stroke. Their thrust reaches 1000N and the stroke can reach 250mm. Rectangular solenoid motors can be used individually and are ideal for producing X-Y axis motion, primarily targeting the semiconductor and micro-machine tool industries.

Its basic working principle is that when an electric conductor passes through a magnetic field, it generates a force perpendicular to the lines of the magnetic field. The magnitude of this force depends on the length of the conductor passing through the field, as well as the intensity of the magnetic field and the current. The coil motor converts actual current into linear thrust or torque, with their magnitudes being proportional to the actual current passing through. The thrust magnitude generated by the coil motor depends on the design structure and the intensity of the current: F = β*L*I. The relationship between current and the generated force is manifested as force sensitivity Kf in linear coil motors and torque sensitivity Kt in rotating coil motors. In our design, we define the unit of Kf as N/A, and the unit of Kt as N·m/A.

Yunxi Electromechanical Technology Co., Ltd., based in Langfang, is a technology R&D enterprise in partnership with universities, specializing in: brushless frameless torque motors, voice coil motors, stepper motors, servo motors, and screw displacement tables; as well as special products: vacuum high/low temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high/low temperature screw platform, vacuum radiation screw platform, vacuum electrodes, ion gauges. We offer customized development and design according to specific customer requirements.

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