High-frequency response direct-drive rectangular coil motor for photolithography machine application

Voice Coil Linear Motor, also known as Lorentz motor or Scanner motor, gets its name from its structure resembling a loudspeaker's voice coil. It is a fast-response direct-drive motor with zero hysteresis and cogging effects, featuring high frequency response, high acceleration, high speed, good force characteristics, easy control, small size, and high resolution. Internationally, voice coil motors are regarded as excellent servo drives. Depending on the configuration of the drive, feedback, controller, and control algorithm, voice coil motors typically achieve motion frequencies of 500-1000 Hz, even higher.

Cylindrical solenoid motors, due to their ability to provide high thrust and speed, are widely used. These motors can generate powerful forces ranging from 0.7N to 2500N, thus occupying 80% or even higher market share, with a stroke generally not exceeding 50mm.

Its basic working principle is that when an electric conductor passes through a magnetic field, it generates a force perpendicular to the lines of the magnetic field. The magnitude of this force depends on the length of the conductor passing through the field, the strength of the magnetic field, and the intensity of the current. The coil motor converts actual current into linear thrust or torque, with their magnitudes proportional to the actual current passing through. The magnitude of the thrust produced by the coil motor depends on the design structure and the intensity of the current: F = β*L*I. The relationship between current and the generated force is manifested as the force sensitivity Kf in linear coil motors and the torque sensitivity Kt in rotating coil motors. In our design, we define the unit of Kf as N/A and the unit of Kt as N·m/A.

Yunxi Electromechanical Technology Co., Ltd. of Langfang, a technology research and development enterprise in collaboration with universities, specializes in: DC frameless torque motors, voice coil motors, stepper motors, servo motors, and screw displacement tables; special products include: vacuum high and low temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high and low temperature screw platform, vacuum radiation screw platform, vacuum electrodes, and ion gauges. We can also develop and customize designs according to customers' specific requirements.

Contact: Mr. Guo

Tel:18101383264  

QQ 1024540961  

Email:18101383264@163.com