Rectangular coil motor for photolithography applications in the semiconductor field

Voice coil linear motors, also known as Lorentz motors or scanner motors, are named for their structure resembling the coil of a speaker. They are a fast-response direct-drive motor with zero hysteresis and zero cogging effects, featuring high frequency response, high acceleration, high speed, good force characteristics, easy control, small size, and low resolution. Abroad, voice coil motors are considered excellent servo drives. Depending on the configuration of the drive, feedback, controller, and control algorithm, voice coil motors typically achieve motion frequencies of 500-1000 Hz, even higher.

Cylindrical solenoid motors, due to their ability to provide high thrust and speed, are widely used. These motors can generate powerful forces ranging from 0.7N to 2500N, thus occupying 80% or even more of the market, with their stroke generally not exceeding 50mm.

Voice coil motors come in cylindrical, rectangular, and pendulum angles, which are common, but voice coil motors can be customized with special structures. The permanent magnet can be integrated as part of the housing, the coil can be placed in a different location, the coil can be altered to a different shape, and the permanent magnet can be shaped into a special structure—all of which are achievable. Often, people get stuck within this limited scope, but voice coil motors can be improved according to your requirements.

Yunxi Electrical & Mechanical Technology Co., Ltd. of Langfang, a technology research and development enterprise in collaboration with universities, specializes in: brushless DC torque motors, voice coil motors, stepper motors, servo motors, and screw displacement tables; as well as special products: vacuum high and low temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high and low temperature screw platform, vacuum radiation screw platform, vacuum electrodes, and ion gauges. Custom development and design according to customer's specific requirements is available.

Contact Person: Mr. Guo

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