Vacuum High and Low Temperature Voice Coil Motor for Photolithography Applications - Easy to Control, Suitable for Medical Field Use

Voice coil linear motors, also known as Lorentz motors or scanner motors, are named for their structure resembling the coil of a speaker. They are a fast-response direct-drive motor featuring zero hysteresis and zero cogging effects, with high frequency response, acceleration, speed, good force characteristics, ease of control, compact size, and small resolution. Abroad, voice coil motors are considered excellent servo drives. Depending on the configuration of the drive, feedback, controller, and control algorithm, voice coil motors typically achieve motion frequencies of 500-1000 Hz, and even higher.

Cylindrical solenoid motors, due to their ability to provide high thrust and speed, are widely used. These motors can generate powerful forces ranging from 0.7N to 2500N, thus occupying 80% or more of the market, with their stroke typically not exceeding 50mm.

Its basic working principle is that when an electric conductor passes through a magnetic field, it generates a force perpendicular to the lines of the magnetic field, the magnitude of which depends on the length of the conductor passing through the field, the strength of the magnetic field, and the intensity of the current. The voice coil motor converts actual current into linear thrust or torque, with their magnitudes proportional to the actual current passing through. The magnitude of the thrust produced by the voice coil motor depends on the design structure and the intensity of the current: F = β*L*I. The relationship between current and the generated force is manifested as force sensitivity Kf in linear voice coil motors and torque sensitivity Kt in rotating voice coil motors. In our design, we define the unit of Kf as N/A, and the unit of Kt as N·m/A.

Yunxi Electrical & Mechanical Technology Co., Ltd., located in Langfang, is a technology R&D enterprise in partnership with universities. Our main products include: DC frameless torque motors, voice coil motors, stepper motors, servo motors, and screw displacement tables; special products: vacuum high and low temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high and low temperature screw platform, vacuum radiation screw platform, vacuum electrodes, and ion gauges. We can develop and customize according to customers' special requirements.

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