Small Volume Direct-Drive Rectangular Coil Motor for Lithography Applications

Voice coil linear motors, also known as Lorentz motors or scanner motors, are named for their structure resembling the coil of a loudspeaker. They are a fast-response direct-drive motor with zero hysteresis and zero cogging effects, featuring high frequency response, high acceleration, high speed, good force characteristics, ease of control, compact size, and small resolution. Abroad, voice coil motors are considered excellent servo drives. Depending on the configuration of the drive, feedback, controller, and control algorithm, voice coil motors typically achieve motion frequencies of 500-1000 Hz, even higher.

Cylindrical solenoid motor, due to its ability to deliver high thrust and speed, it finds extensive applications. This motor can generate powerful forces ranging from 0.7N to 2500N, thereby occupying 80% or even higher of the market share, with its stroke typically not exceeding 50mm.

Voice coil motors are primarily used in short stroke, high-speed, and high-acceleration movements, ideal for confined spaces; commonly, the auto-focus function in smartphone cameras is entirely handled by the entire drive unit. The cylindrical voice coil motor series is widely applied in the market. These motors have a high acceleration rate, capable of generating powerful forces ranging from 0.7N to 1000N, with a stroke less than 50mm. This model is mainly used in medical, semiconductor, aviation, and automotive fields, including valve brakes, small replacement measuring instruments, vibration platforms, and active vibration damping systems, among many other applications.

Yunxi Electromechanical Technology Co., Ltd. (Langfang), a technology R&D enterprise in collaboration with universities, specializes in: brushless frameless torque motors, solenoid motors, stepper motors, servo motors, and screw displacement tables; as well as special products: vacuum high and low temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high and low temperature screw platform, vacuum radiation screw platform, vacuum electrodes, ion gauges. We can also develop and design custom products according to specific customer requirements.

Contact Person: Mr. Guo

Tel:18101383264  

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Email:18101383264@163.com