Anke Electrical Co., Ltd.

Abstract:Semiconductors are hailed as the "brain" of manufacturing, holding a dominant position in key industries and sectors crucial to national security and the vital artery of the national economy. As the development of digital technology and the increasing share of the digital economy in the national economy, the importance of the semiconductor industry will continue to rise. A reliable power supply is essential for safe production. This article focuses on the power supply and distribution system project for semiconductor production. In accordance with specific requirements, a wireless temperature measurement device is selected to monitor the temperature of sensitive equipment within the substation, preventing local overheating and potential fires. The wireless temperature measurement system is also used for monitoring and control, achieving electrical automation of the power supply and distribution system and the company's production. This system can safely, reliably, and conveniently obtain real-time temperature information of power equipment, enabling remote fault warnings and condition analysis, and providing support for the safe operation of the power grid in semiconductor factories.

Keywords:Semiconductor; Wireless Temperature Measurement; Wireless Temperature Measurement System

1 Overview

Zhejiang's semiconductor project requires real-time monitoring and fault warning management for the user's power distribution system. This necessitates the collection of power data from the 10kV and 0.4kV distribution rooms of the semiconductor factory, as well as real-time temperature monitoring of electrical nodes within the distribution panels. This ensures early warnings for potential hazards, early detection, and timely investigation, guaranteeing the normal operation of the semiconductor workshop's power distribution system.

In response to the actual production process requirements of our users, we have installed intelligent power meters on all 10kV and 0.4kV circuits in Factory 1 and Factory 2. Additionally, we have equipped the 0.4kV incoming line cabinets, capacitor cabinets, busbar cabinets, and each outgoing line cabinet with six temperature sensors. A power monitoring system has been set up on the first floor monitoring center of Factory 1, which collects and manages the power meters and wireless temperature data in real-time, ensuring the reliable operation of the semiconductor power distribution system.

2 Product Solutions

2.1 Product Requirements

This round ofZhejiang Semiconductor ProjectThe project requires configuring wireless temperature measurement products, with the following specifications for the sensors:

Battery-Free Wireless Temperature Sensor (powered by induction charging)

2) Wireless Frequency: 470 MHz;

3) Starting Current: ≥5A

4) Temperature Range: -50°C to +125°C

5) Sampling Frequency: 15s

6) Transmission Frequency: 15s

Accuracy: ±1°C

8) Operating Temperature: -40°C to +85°C

9) *High Working Current: Rated current of 5000 A.

10) Temperature Rise Requirement: Under rated operating conditions, the device should not reach a temperature that may affect the insulation of the primary equipment in the switchgear or the normal operation of the measurement point. When the current transformer coil of the device passes through 1250 A for 30 minutes, and the ambient temperature is 20°C, the surface temperature rise of the wireless temperature sensor should not exceed 10 K.

11) Transmission Distance: No more than 150 meters in open space.

The project requires the following specifications for the receiver:

1) Power Supply: AC/DC 85V-264V; DC 12~48V

2) Transmission Distance: No more than 150 meters in open space.

3) Communication Interface: 1 channel RS485 serial communication interface, Modbus-RTU communication protocol

4) Installation Method: 35mm Track-Type

5) Number of Test Points: Not less than 240 points

6) High Temperature Alert: 2 alarm outputs.

According to the aforementioned requirements, the following Ankoray wireless temperature measurement products have been selected as shown in the table.

2.2 Product Solutions

For illustration, take the power distribution room of factory No. 2 as an example; the situations of other power distribution rooms can be adjusted according to actual conditions. This power distribution room has a 0.4kV 3-phase busbar, with Bus No. 1 (T7) featuring 5 outgoing cabinet bays, 1 UPS cabinet, 1 shunt reactor cabinet, and 2 shunt reactor SVG cabinets. The outgoing cabinets have a total of 35 drawers. Bus No. 2 (T8) has 3 outgoing cabinet bays, 1 shunt reactor cabinet, and 1 shunt reactor SVG cabinet, with a total of 19 outgoing loops. Bus No. 3 (T9) has 1 outgoing cabinet bay, 1 incoming cabinet bay, and 1 shunt reactor SVG cabinet, with a total of 9 outgoing loops. The busbar layout is shown in Figure 1, and the power distribution room layout in Figure 2. The distance to the 0.4kV switchgear at the gateway is no more than 30 meters.

2.3 Product Details

This project utilizes a total of 1200 wireless passive temperature sensors and 18 wireless temperature transceivers. The detailed configuration and installation plan are as follows in the table below.

3 System Requirements

The scope of this project's monitoring includes not only the wireless temperature measurement sensors mentioned in the current plan, but also various intelligent electricity meters and 10kV micro-computer protection within the original power distribution cabinet. The communication and networking principles are as follows:

For micro-computer protection devices, the connection is determined by the communication interface and protocol of the micro-computer protection device. If the on-site micro-computer protection device's communication interface is an Ethernet port with the IEC 103 protocol, each micro-computer protection unit is connected to the switch via a network cable and then to the data fusion terminal, ultimately connecting to the power monitoring and control system platform through a fiber optic local area network; if the on-site micro-computer protection is an RS485 interface with Modbus-RTU protocol, the network is set up using shielded twisted pair cables in a daisy chain configuration, with no more than 5 micro-computer protection units connected to each 485 bus, which are then connected to the data fusion terminal, and finally, the data fusion terminal connects to the power monitoring and control system platform via a fiber optic local area network.

For wireless temperature measurement, the wireless temperature sensor uploads signals to the data fusion terminal via an RS485 bus. Recently, it has been connected to the power monitoring and control system platform through a fiber optic local area network.

For the multifunctional electricity meters, this section is mainly networked through the RS485 interface and Modbus-RTU protocol, using a daisy-chain method with shielded twisted pair cables. Each 485 bus can accommodate up to 20 multifunctional electricity meters, which are then connected to a data fusion terminal. The data fusion terminal subsequently accesses the corporate power monitoring and control platform via an optical fiber local area network.

System Architecture Diagram

Network topology diagram of the switchgear room

2# Factory Power Distribution Room Network Topology Diagram

4 System Features

The power monitoring system provides a clear display of the primary system diagram and real-time showing of remote measurements, remote signals, and alarm signals across all voltage levels from 10kV to 0.4kV. Remote measurements include electrical parameters such as voltage, current, power, energy, and temperature values of electrical nodes within high and low voltage cabinets; remote signals encompass the switching states of circuit breakers, handcars, disconnectors, load switches, and ground switch in medium voltage switch cabinets.

The wireless temperature measurement system features a user-friendly human-machine interface, which can visually display temperature data from various measurement nodes in the form of a primary distribution diagram, as well as related fault and alarm signals.

Historical temperature curve, real-time temperature curve lookup, real-time temperature data inquiry

Query for the operational temperature reports of each circuit device

The Acrel-2000Z Power Monitoring System features real-time alerting capabilities, enabling the system to issue alerts for events such as the change of remote signals in distribution circuit circuit breakers, isolating switches, and grounding knives, as well as protective actions and accidental tripping. The following alert methods can be selected:

Pixel Flicker

2. Pop-up alarm window event;

3. Real-time voice function, the system can issue voice alarms for all events.

4. SMS Alerts: Send alert messages to specified mobile numbers.

5. Phone Alert: the system can dial a specified mobile number.

6. Sound and light alarm activated.

5 On-site Installation Photos

For transformer outgoing cabinet, SVG, and APF cabinets, collect data from 3 points each (ABC phase, totaling 6 points); for UPS and low-voltage drawer cabinets, collect data from 6 points of incoming and outgoing lines, with one ATE400 sensor used per point.

The wireless temperature sensor transmitter is installed in the cabinet cable room.

Installation Diagram for Receivers and Sensors

6 Conclusion

This article introduces the Ankoray Wireless Temperature Measurement Product.Zhejiang Semiconductor ProjectOur application monitors the temperature of electrical connection points within low-voltage switchgear frame circuit breakers and drawer-type circuit breakers with plastic casings. The semiconductor industry has a wide range of applications and is a new industry that the country is accelerating support for development. The safe and reliable operation of the power grid produced by this industry is particularly important. To prevent safety issues caused by factors such as oxidation, loosening, and dust leading to excessive contact resistance and heat generation, online temperature monitoring is required. This ensures timely, continuous, and accurate reflection of the equipment's operating status, avoiding safety accidents and reducing the rate of equipment failures.

Reference

Ankorri Enterprise Microgrid Design and Application Manual. November 2019 Edition

[2] Ankerui Smart Grid User Terminal Power Monitoring/Energy Management/Electrical Safety (Product Price Catalogue). January 2020 Edition

[3] Ankelei's 35KV and Below Substation Intelligent Power Distribution System Design and Product Second Edition Schematic Collection. July 2019 Edition

[4] Ankelei User Substation Integrated Automation and Operation & Maintenance Solution. January 2020 Edition