Anti-stick Coating Vacuum Deposition Machine, Coating Machine, Anti-adhesion Gas Phase Deposition System

(HMDS - Hexamethyldisilane, Vinyltrimethoxysilane, PFTS - Triple Filter, etc.) As a category of important organosilicon compounds, they are widely used in various fields such as surface modification of materials, reinforcement of composite materials, and coating preparation.

Application Fields: Semiconductor: Hydrophobic treatment before wafer lithography, mask hydrophobic treatment, LED chip processing, Sapphire, Precious metals, Silicon wafers, InP, GaAs, Lithium niobate LiNbO₃, Zinc sulfide ZnS, Masks, Glass, Quartz wafers, Sapphire, Wafer, Silicon carbide, and other third and fourth generation semiconductor materials. Flat Panel Displays: Used for mass production of high-performance display panels. Solar Cells: Improve the production efficiency and performance of thin-film solar cells. Aerospace New Materials: Hydrophobic treatment of ceramic fiber boards. Mobile and Tablet Devices: Anti-fingerprint, waterproof treatment, etc. Nanoimprint: Stage of nanoimprint demolding.

Anti-stick Coating Machine, Coating Equipment, Anti-adhesive Vapor Deposition System Performance

Internal Volume: 20-5,000L

Material: Outer case made of cold-rolled steel with paint or high-quality SUS#304 stainless steel, inner cavity made of 316L stainless steel

Control Method: Human-Machine Interface + PLC

Temperature Range: RT-450℃

Volatility: ≤±0.5

Vacuum Degree: ≤1 torr

Power supply and total power: 220V/380V

Vacuum Pump: Oil-Free Pump