Hard Coating Clean Drying Oven, Nitrogen Hard Coating Oven, JS-MOL125 Class 100 Cleanroom Oven
The purpose of the hard bake oven is to bake the developed substrate at a certain temperature. This smooths out the surface of the photoresist due to surface tension, reducing defects within the photoresist layer and helps refine the edge profiles of the photoresist patterns.
Hard Coating Clean Drying Oven Nitrogen Hard Coating Oven JS-MOL125 Class 100 Cleanroom OvenTechnical Performance:
Temperature Range: RT to 250℃
Uniformity: ±2%℃
Temperature Fluctuation: ±0.5℃ (no load)
Temperature Control Accuracy: ±0.1℃
Cleanliness: Class 100
Time Range: 99H 99M
Gas Atmosphere: N2
Internal Dimensions (mm):
450×450×450
500×500×550
600×700×800 (Customizable)
Power Supply: 380V, 50Hz
Mold Plates: 2-4 pieces (height adjustable)
Expandable Features:
Double-chamber or multi-chamber
Smart network functionality, MES and other industrial automation software
Scanner Gun, Scan Traceability, One-Tap Reading
Automatic door control, master computer programming, robotic arm handling products
Hard Coating Clean Drying Oven Nitrogen Hard Coating Drying Oven JS-MOL125 Class 100 Cleanroom Oven Manufacturer
Hard-coating ovens can also be used for the pretreatment baking before coating and hard-coating baking after coating, as well as high-temperature baking after development, of materials such as silicon wafers, silicon carbide, niobium lithium, glass, etc., in semiconductor manufacturing. They are also suitable for production and research departments in IC packaging, photoresist curing, silver adhesive curing, electronic liquid crystal displays, LCDs, CMOS, IS, and laboratories; as well as for drying, heat treatment, aging, and other high-temperature tests of non-volatile and non-flammable or explosive items.




