HMDS Pretreatment Machine, Intelligent HMDS Vacuum Oven, Offer HMDS Oven Prototype Function

HMDS (hexamethyldisilazane) is a photoresist coupling agent for semiconductor applications.

     HMDS OvenHexamethyldisilazane (HMDS) is vapor-deposited onto the surfaces of silicon wafers, InP, GaAs, LiNbO₃, ZnS, mask glass, quartz wafers, sapphire, wafers, and SiC for the third and fourth generation semiconductor materials, followed by system heating. This process successfully transforms the silicon wafer surface from hydrophilic to hydrophobic, with its hydrophobic base capable of bonding well with photoresist, serving as a coupling agent.

HMDS Pretreatment Machine, Intelligent HMDS Vacuum Oven, Offer HMDS Oven Prototype Technical Specifications

Processable Products: 2-12 inch wafers and squares compatible ( customizable)

Material: Inner box made of 316L stainless steel

Temperature Range: 80-200℃

Vacuum Level: ≤1 torr

Process Quantity: 5 Process Settings and Save

Operation Interface: Intelligent color man-machine interface, one-touch operation for process completion

Oil-Free Scroll Vacuum Pump (or Diaphragm Pump)

HMDS Pretreatment Machine, Intelligent HMDS Vacuum Oven, Offer HMDS Oven Prototype with Additional Features

HMDS Low-Level Alarm Alert Function

Process Data Recording Feature

Dehydrated Roasted

Temperature Protection Program Lockout Protection

Graphical Inversion Feature

HMDS Leak Alarm Alert Function