详情描述

Core Advantages

Technical Specifications

I. General Specifications and Features:

Weight: 200 kg

2. Dimensions: 800mm long x 800mm wide x 600mm high (including microscope)

Total Power Consumption: 8KW (with the compressor consuming about 7KW, the rest approximately 1KW)

 

Section II: Detailed Description

(1) General Specifications and Features:

Weight: 200 kg

2. Dimensions: 800mm long x 800mm wide x 600mm high (including microscope)

3. Total Power Consumption: 8KW (with the compressor consuming about 7KW, the rest approximately 1KW)

(II) Structural Description:

1. Vacuum cavity:

Sealed vacuum chamber, 25L volume, capable of reaching an ultimate vacuum pressure of 1×10^-10 mbar. Combined with an exhaust filter, it prevents contamination of the customer's work environment. The top is designed with an easy-to-open chamber door for convenient placement of the tested devices. A high-transmittance infrared insulating fused quartz viewport is on the top, suitable for observation under a microscope. Internally equipped with a 2-inch coaxial grounded alloy sample holder and a 4-inch sample holder electromagnetic shielding layer, all at the same potential as the sample holder, with the lowest current leakage of 10fA.

2. Temperature Control Module

Utilizing a high-performance 26C four-channel precision temperature controller, temperature sensor, and heater, the closed-loop refrigeration temperature control range is 4K to 400K / 10K to 400K. For temperature set points below room temperature, cooling is achieved through a low-temperature refrigeration unit; when heating is required, the heater function of the temperature controller is used to ensure smooth temperature control. The temperature control accuracy is 1mK (0.001℃), stability is 10mK (0.01℃), and the temperature measurement error is less than 20ppm/℃.

(1) Thermal Management Module/Heat Sink Treatment:

Temperature sensors are installed on the sample platform, probe arm, and heat radiation shield, providing an accurate temperature control environment. Heat sink treatments are applied between the probe arm, probe, radiation shield, and sample holder to achieve synchronized temperature control among them. Additionally, thermal compensation is performed on the probe to prevent displacement and separation from the sample contact point during temperature change experiments.

(2) Closed-loop Refrigeration Module

Closed-loop refrigeration utilizes an efficient G-M cycle, a secondary regenerative refrigeration machine, and a high-power compressor. The refrigeration unit generates a continuous closed refrigeration cycle, while the compressor supplies high-pressure helium. The G-M refrigeration unit provides the cold source required for the probe station. The advantage of this refrigeration method is that it only requires electricity, and it is not limited by refrigerant and does not consume any. This refrigeration method employs 4K or 10K closed-loop refrigeration units for the low-temperature probe stations, with corresponding sample stages temperatures lower than 4K and 10K. The primary refrigeration platform of the refrigeration unit cools the radiation shield and supporting connections, while the secondary refrigeration platform cools the sample stage and the probe.

3. Probe Control Module

Up to six rigid structural vacuum bellows arm connectors can be externally connected to the vacuum chamber. Each arm can be micro-adjusted in the XYZ three-dimensional linear direction and the Ө horizontal angle, achieving positioning and adjustment of the probe inside the vacuum chamber. The arms are equipped with linear tracks and a four-axis differential head structure. The XYZ three-dimensional linear adjustment range is 50mm x 25mm x 25mm, with an adjustment precision of 1 micron. The adjustable range for the Ө horizontal angle is ±5°, with an angle precision of 0.01°. Each vacuum bellows arm provides two vacuum electrical interfaces, suitable for DC/Pulse/RF testing.

4. Microscope Module:

Utilizing a video microscope with adjustable articulated arms, capable of moving in any X-Y-Z direction, paired with a high-definition industrial camera and a liquid crystal monitor, achieving observation resolution at the um level.

5. Vibration Isolation Module

Integrated air cushion isolation bracket system with testing platform, load-bearing capacity: 300KG, vacuum isolation vertical frequency better than 1 Hz, horizontal frequency better than 2 Hz, isolation effect better than 0.5 micrometers.